High Precision Series Wafer Level Sorting Machine

HY-WS600 Series Sorting Machine enables "precision sorting, high-efficiency mass production, and cost control" in advanced packaging processes, making it one of the core domestic alternatives for semiconductor back-end packaging equipment. It fills the critical wafer-level processing segment in the test and sorting product line, completing the full industrial chain solution for semiconductor back-end processes.It supports 6-inch, 8-inch, and 12-inch wafers, as well as full-size die ranging from 0.5×0.5 mm to 15×15 mm, covering a wide range of devices including SiC, IGBT, CIS, and MEMS.

Key Capabilities & Benefits

The test and sorting product line covers over 95% of chip test and sorting scenarios, meeting the requirements for consumer-grade, industrial-grade, and automotive-grade chips. Featuring a fully automated closed-loop process, it improves inspection efficiency by 60% and achieves 99.9% yield control, empowering enterprises to reduce costs and increase efficiency.It delivers precise sorting and classification with ±25 μm accuracy, high flexibility, and 10 μm minimum defect detection capability during the semiconductor packaging process.

Application Scenarios

Photoelectric performance testing of light-sensing chips, TOF chips, and other related devices, as well as long-duration burn-in/testing of chips.

Technical Specifications

Item	Specification
Model	HY-WS600A	HY-WS601A
Incoming Form	6/8/12-inch Wafer, Tray, Tape & Reel
Die Size	0.5×0.5mm ~ 15×15mm
Die Thickness	≥ 80 μm
UPH	≥ 20K	≥ 5K
Output BIN Count	Single BIN	Multi-BIN (Max. 6 BINs)
Output Format	6/8/12-inch Wafer / Tray / Tape & Reel	Tray / Tape & Reel
Force Control Range	50g (0.5N) ~ 1000g (10N)
Force Control Accuracy	≤ ±10%
Placement Position Accuracy	±25 μm @ 3σ
Placement Angular Accuracy	±0.5° @ 3σ
Front & Back Side Inspection	Detection precision: >10 μm, detectable with contrast ≥30;
	Defect types: Scratches, stains, foreign matter, die cracks, chipped dots, chipped edges, etc.
Equipment Dimensions	1500mm (L) × 1500mm (W) × 1900mm (H)	2400mm (L) × 2300mm (W) × 1900mm (H)

Product Details