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600W Adjustable Digital Low-Temperature Direct Spray Plasma Cleaning Machine for Semiconductor Chips

HY-DD600 adopts narrow small nozzle design (2–6mm effective width), dedicated for tiny precision sensitive parts including chips, FPC flexible circuits, miniature BGA substrates. Zero-potential low-temperature plasma jet eliminates thermal burn risk for ultra-thin PI/ITO materials. Its compact gun fits narrow gaps and complex micro-structures, perfectly matching small automatic bonding & dispensing lines for semiconductor packaging and camera module pretreatment.

  • Brand :

    HYRNUS
  • Item No. :

    HY-DD600
  • Order(MOQ) :

    1 Set
  • Warranty :

    One-Year Warranty and Lifetime Maintenance
  • Payment :

    T/T
  • Lead Time :

    7-35 Days
  • Product Origin :

    China
  • 600W Adjustable Digital Low-Temperature Direct Spray Plasma Cleaning Machine for Semiconductor Chips

    Product Introduction

    HY-DD600 Digital Low-Temperature Direct-Spray Plasma Cleaning Machine adopts full digital intelligent control and a narrow nozzle with a 2–6mm effective treatment width, designed for miniature precision parts including chips, FPCs and micro BGA substrates. Its neutral zero-potential low-temperature plasma jet releases mild heat to avoid thermal damage on ultra-thin PI & ITO thin films, and the compact gun can reach tiny gaps and intricate micro-structures.

    Working under atmospheric pressure, it delivers precise cleaning, surface activation and micro-etching without harming workpieces. Equipped with full digital power adjustment, it perfectly matches small bonding and dispensing lines for semiconductor packaging and camera module pretreatment, solving adhesion failure, delamination and peeling problems in bonding, printing and dispensing processes.

    Product Features

    1. Military-standard hardware supports stable operation at -25°C~50°C; MTBF ≥190,000hrs per MIL-HDBK-217F (25°C).

    2. Full digital control & display for real-time monitoring and strong noise immunity.

    3. TI soft-switch circuit + PFC correction boosts efficiency by 10%+, response under 0.1s with great anti-interference ability.

    4. ST ARM chip delivers simple HMI and remote debugging. Self-developed program achieves auto power matching for steady output.

    5. RS-485 & I/O ports support multi-data remote monitoring.

    6. Six real-time monitoring items: air pressure, motherboard temp, transformer arc voltage, primary peak current, mains current, gun rotating speed.

    7. 10+ fault alerts cut diagnosis time by over 80%; one-click switch for jet, rotary and linear spray heads.

    8. Complete safety protection: overheat, overload, short/open circuit, leakage and wrong operation protection.

    Product Application

    This equipment processes precision curved and irregular workpieces to conduct surface cleaning, molecular activation and micro-etching. It thoroughly resolves common production issues including poor adhesion, glue delamination and ink peeling.

    It serves as essential pre-treatment equipment for various sectors: semiconductor packaging, 3C electronics, touch panels, LED encapsulation, automotive parts, new energy lithium batteries, plastic, metal and glass materials.

    Equipment Structure

    The open-air direct jet plasma surface treatment system consists of three core parts: power supply unit, direct jet plasma spray gun and control module.

    1. Power Generator

    It supports automatic power matching to deliver stable, high-precision output without being disturbed by air pressure fluctuations. Operators can adjust all operating parameters according to the actual working state of samples for ideal processing performance.

    2. Direct-Spray Plasma Gun

    Designed for tiny, intricately shaped workpieces, this gun delivers a treatment width ranging from 2mm to 6mm. It can be integrated with existing production lines to enable fully automatic inline processing and cut labor expenses.

    3. Control System

    Housed inside the power supply main unit, this module governs the whole operation of the atmospheric plasma cleaner and provides full-system safety protection.

    Plasma Generator Dimensions

    Main Unit Outline Dimension Drawing

    plasma treatment surface modification

     

    Plasma Gun Dimensions

    Outline Drawing of Plasma Gun

    Atmospheric plasma cleaning

    Technical Specifications: Atmospheric Plasma Generator Main Unit

    1. Atmospheric Plasma Generator

    (1) Main Unit Parameters

    Item Parameter
    Model HY-DD600
    Overall Dimension 491*200*332 mm (Length * Width * Height)
    Weight 10 KG
    Input Power Supply AC 220V
    Power Frequency 25 KHz
    Plasma Output Power 0–600 W, adjustable & displayable
    Control Mode RS485 / I/O Control / Manual
    Protection & Alarm Functions Rotation speed, temperature, voltage, air pressure, overload, electric leakage, power mismatch, short-circuit, open-circuit, overcurrent protection
    Detection Functions Air pressure detection, power detection, rotation detection, output power detection, mainboard temperature detection, transformer primary peak current detection

     

    (2) Atmospheric Direct-Spray Plasma Gun Specifications

    Item Parameter
    Gun Dimension 255.5 mm * 50 mm
    Nozzle Sizes Standard 2 mm, 4 mm, 6 mm
    Plasma Treatment Height 3–20 mm
    Effective Plasma Treatment Width 1–8 mm
    Air Pressure Range Standard 0.2 MPa, adjustable from 0.08–0.25 MPa

     

    2. Factory Installation Requirements

    Item Specifications
    Power Supply Requirement Single-phase AC220V, 10A; grounding resistance less than 4Ω
    Factory Exhaust System Flow rate: 5m³/min; Material: corrosion-resistant material
    Factory Compressed Air Requirements Pipe diameter: 8mm
    Pipe material: PU tube
    Pressure: 0.4–0.6MPa
    Air quality standard:
    Solid particle diameter ≤0.1μm,
    Oil content ≤0.01mg/m³,
    Dew point ≤ -40°C
    3. General Specifications
    Item Details
    Hazard Marking High Voltage Warning Label
    Operating Environment Temperature: 15~35°C
    Humidity: 30~80%
    Other Precautions The working area must be free of flammable gas, corrosive gas, explosive or reactive dust

     

    Product Details

      •  

    Low-Temperature Direct Spray Plasma Cleaner
    Can HY-DD600 atmospheric plasma cleaner be installed on automated production lines?

    Yes. It supports RS485 and I/O control with 0–600W adjustable digital power. The compact direct-spray gun can be seamlessly integrated into dispensing, packaging and coating automatic assembly lines.

    Will HY-DD600 low-temperature plasma jet damage sensitive chips and PI/ITO films?

    No. Equipped with zero-potential design, this plasma cleaner generates low heat without thermal burns, perfectly suitable for precision semiconductor and FPC substrate pretreatment.

     

     

     

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If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.
Contact us:allen@hyrnus.com