Product Application
This equipment is applicable for processing silicon wafers, plastic packaged components (QFN, BGA, etc.), PCBs, ceramic substrates (alumina, zirconia, etc.), oxide ceramics (thermistors, varistors, photoresistors), glass, quartz, lithium niobate, lithium tantalate, and magnetic materials.
It is widely used for precision dicing across industries including electronic components, integrated circuits (IC), LEDs, solar cells, optical devices, fiber-optic parts and electronic ceramics.
Reliable and convenient operating system
1. A 15-inch touch operation panel displays comprehensive machine operating status data, delivering an easier and smoother operating experience.
2. All fluid parameters are software-controlled and stored in program groups, cutting down debugging time during product changeover.
3. Custom optimized software for multi-workpiece cutting paths delivers 10% higher processing speed than traditional cutting routines.
4. Self-developed low-level motion control and image processing algorithms enhance the overall system’s reliability and stability.
5. It supports SEMI industry-standard communication protocols for easy integration with factory automation systems.
Technical Specifications
| No. |
Item |
Specification Parameters |
Remarks |
| 1 |
Processing Size |
Φ210 mm / Φ150 mm |
8-inch / 6-inch |
| 2 |
Imported Spindle |
Rotation Speed: 10000–60000 rpm |
|
| Power: 1.8 kW |
| 3 |
X-Axis |
Dicing Travel: Max. 220 mm |
|
| Drive Type: Servo Motor |
| Resolution: 0.001 mm |
| Dicing Speed: 0.1–1000 mm/s |
| 4 |
Y-Axis |
Dicing Travel: Max. 220 mm |
|
| Drive Type: Servo Motor + Full Closed-Loop Grating Ruler |
| Repeat Positioning Accuracy: 0.002 mm / 5 mm |
| Resolution: 0.0005 mm |
| Cumulative Error: 0.005 mm / 220 mm |
| Dicing Speed: 0.1–300 mm/s |
| 5 |
Z-Axis |
Effective Travel / Chuck Size: Max. 30 mm / Φ58 mm |
Max. cutting depth ≤ 4 mm |
| Drive Type: Servo Motor |
| Resolution: 0.001 mm |
| Repeat Positioning Accuracy: 0.001 mm |
| Chuck Size: Φ47.4 mm ~ Φ54 mm |
| Blade Outer Diameter: Max. Φ58 mm |
| Max. Travel Speed: 90 mm/s |
| 6 |
θ Axis |
Rotation Range: Max. 380° |
|
| Drive Type: DD Direct Drive Motor |
| Repeat Positioning Accuracy: 3 arcseconds |
| Resolution: 0.0002° |
| 7 |
Alignment System |
Illumination: Coaxial + Ring Light |
|
| Magnification: Low 0.75X / High 1.5X |
| Visible Image Resolution: 0.0005 mm |
| 8 |
Equipment Weight |
500 kg ±5% |
|
| 9 |
Overall Dimension |
1030 mm × 900 mm × 1750 mm |
|
| 10 |
Total Equipment Power |
4 kW |
|
Operating Environment
| Item |
Specifications |
| Ambient Temperature |
The machine shall be installed in an environment of 25°C, preferably a constant-temperature dust-free cleanroom. |
| Power Supply |
Single-phase AC220V, 4kW |
| Compressed Air |
Adopt compressed air with filtration efficiency ≥99.5% for 0.01μm particles. Equipped with refrigerated air dryer for dehumidification. |
| Air pressure: 0.6–0.8MPa |
| Air consumption of spindle: 80L/min |
| Total air consumption of the whole machine: 190L/min |
| Dicing Water |
Dicing water temperature shall be controlled at room temperature ±2°C, pressure 0.2–0.4MPa. Tap water is acceptable, and wastewater can be directly discharged after treatment. |
| Water consumption: 2L/min |
| Cooling Water (Spindle Cooling) |
Circulating pure water supplied by water purifier. Water temperature controlled at room temperature ±2°C, pressure 0.2–0.4MPa. |
| Surroundings |
Do not install the equipment beside blowers, air vents, or equipment generating high temperature and oil mist. |