Semiconductor Metallurgical Measuring Microscope For IC Package Inspection

The HY-TM200 Semiconductor Metallurgical Measuring Microscope is designed for high-precision inspection and dimensional measurement of semiconductor packages, ICs, PCBs, and electronic components. It integrates optical observation, digital imaging, and measurement functions into one compact system for laboratory and production applications.

Featuring an infinite optical system, bright-field and dark-field observation modes, and high-resolution industrial CCD imaging, the microscope delivers clear images and accurate measurement results. With positioning accuracy up to ±0.1 μm and multiple measurement functions including length, angle, radius, and height, it is well suited for semiconductor quality control, failure analysis, and R&D. Customized fixtures are available to accommodate various inspection requirements.

Product Specifications

Item	Details
Model	HY-TM200
Dimensions	700 x 800 x 800 mm
Weight	85 kg
Glass Dimensions	230 x 160 mm
Stage Dimensions	358 x 258 mm
Travel Range	200 x 100 x 150 mm
Grating Scale Resolution	Z-axis: ±0.1 µmXY-axis: ±0.5 µm (optional ±0.1 µm)
Optical System	Infinite focal length optical system
Movement Type	Manual
Objectives	5X, 10X, 20X, 50X
Eyepiece	10X
Field of View	Inverted image
Observation Methods	Bright field and dark field modes, freely switchable
Surface / Bottom Light Source	3W LED coaxial illumination
XYZ Positioning Accuracy	±0.1 µm
XYZ Repeatability	±0.1 µm
XY Measurement Accuracy	(3 + L/100) µm(L = measured length)
Z Measurement Accuracy	(3 + L/25) µm(L = measured height)
Display Functions	RS232 output, XYZ zeroing / centering, imperial/metric conversion, accuracy calibration
Z-axis Controller	High-precision coaxial wheel for vertical movement control
Z-axis Positioning Accuracy	±0.1 µm
Operating Voltage	AC 220V
Rated Power	100W

 

Key Functions

No.	Details
1	Gold ball diameter measurement (length measurement)
2	Gold ball thickness measurement (angle measurement)
3	Gold wire arc measurement (radius measurement)

 

Advantages

Item	Details
Versatile Optical Components	Compatible with domestic and imported optical components, supporting bright field, dark field, differential interference contrast (DIC), polarization, and epi-fluorescence modes.
Objective Turret	Can hold up to 5 objectives, with magnifications of 5X, 10X, 20X, 50X and 100X to meet various application requirements.
Imaging System	Equipped with an industrial-grade color CCD camera that captures high-quality images via the zoom lens, converts them into electronic signals and transmits to a computer for analysis.
Ergonomic Data Display Unit	Designed for independent operation with an adjustable angle, enabling comfortable measurement in standing or sitting positions. Supports zeroing and centering functions for high-precision calibration.
Precision Lead Screw Drive	Adopts stainless steel lead screw and nut drive, realizing both fast and fine adjustment to improve measurement efficiency. Stable structure reduces stage vibration and ensures more accurate positioning.

 

Product Details